Waferpedia

Comparison ledger

15 Lapperversus700

Lapmaster 15 Lapper, Lapmaster 700, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
15 LapperLapmaster
700Lapmaster
OEMLapmasterLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLapmaster 15Lapmaster 700
Specifications
Number Of Conditioning RingsUp to 3[1]—
Ring IDUp to 5.5″[1]—
Plate Diameter – Outside15″[1]—
Plate Diameter – Inside3 1/2″[1]—
Standard RPM60[1]—
Drive Motor1/2 HP[1]—
Electrics110V / 1Ph / 60Hz[1]—
Dimensions – Approximate26″(L-R) x 21″(F-B) x 22″(H)[1]—
ConfigurationEquipped with:[1]ring lap, planetary configuration[2]
Equipped with: 15″ Cast Iron PlateIncluded[1]—
Equipped with: (3) Yoke/Roller Bearing AssembliesIncluded[1]—
Equipped with: (3) Conditioning RingsIncluded[1]—
Equipped with: (3) Hold DownsIncluded[1]—
Equipped with: 30 Minute TimerIncluded[1]—
Machine type—Air Bearing Optical Polishing Machine[2]
Form factor—precision floorstanding machine[2]
Intended application—polishing of high precision plano optics[2]
Supported materials—glass, glass ceramic, or crystalline material[2]
Optical polishing pitch plate diameter—700 mm (27.5 in)[2]
Workholder rings—2 + 1 aluminum glass-faced workholder rings, each with an internal diameter of 224 mm (8.8 in)[2]
Drive to support plate—flat multi "V" belt running around the outside edge of the support plate[2]
Main drive motor—totally enclosed, fan cooled, 1.5 kW motor mounted on rails to allow belt adjustment[2]
Electrical service—460 volts, 60 Hz, 3 phase[2]
Machine Type—Air Bearing Optical Polishing Machine (ring lapper / planetary configuration)[2]
Support Plate Diameter—700 mm (27.5 in)[2]
Workholder Rings (Quantity & Internal Diameter)—3 aluminum glass-faced rings, each 224 mm (8.8 in) internal diameter[2]
Drive Type—Flat multi-V belt running around outside edge of support plate[2]
Main Drive Motor Power—1.5 kW[2]
Electrical Service—460 V, 60 Hz, 3 phase[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]web.archive.orgweb.archive.org