Waferpedia

Comparison ledger

120 Continuousversus108T

Lapmaster 120 Continuous, PR Hoffman 108T, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
108TPR Hoffman
OEMLapmasterPR Hoffman
CategoryCMPCMP
Wafer size—up to 12 in wafers
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLapmaster 120 ContinuousPR Hoffman 108T
Specifications
carrier type listing—108T 9B - S/F / Lapmaster LSP-9 / etc.[1]
machine class—for double-sided planetary lapping & polishing machines[1]
wafer sizes stated on insert-carrier page—3 in, 4 in, 5 in, 6 in, 8 in, and 12 in wafers[1]
maximum carrier diameter stated on insert-carrier page—up to 33 in diameter[1]
maximum carrier diameter stated on lapping-carrier page—up to 48 in diameter[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]web.archive.orgweb.archive.org