Waferpedia

Comparison ledger

120 ContinuousversusWG6

Lapmaster 120 Continuous, Logitech WG6, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
WG6Logitech
OEMLapmasterLogitech
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system—GUI
Generation——
FamilyLapmaster 120 ContinuousLogitech WG6
Specifications
System composition—PM6 or LP70 precision polishing machine plus WG6 polishing head[1]
Batch capacity—Up to 6 samples at one time[1]
LP70 capacity with two WG6 heads—Up to 12 specimens at one time[1]
Polishing head speed—Up to 35 rpm[1]
Incremental load per drive rod—Up to 1.4 kg on each individual drive rod[1]
Drive rods—Six drive rods[1]
Motor—Powerful, low voltage DC motor[1]
Material—Corrosion resistant materials[1]
Large specimen example size—76 x 51 mm[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org