Waferpedia

Comparison ledger

120 Continuousversus700

Lapmaster 120 Continuous, Lapmaster 700, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
700Lapmaster
OEMLapmasterLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLapmaster 120 ContinuousLapmaster 700
Specifications
Machine type—Air Bearing Optical Polishing Machine[1]
Configuration—ring lap, planetary configuration[1]
Form factor—precision floorstanding machine[1]
Intended application—polishing of high precision plano optics[1]
Supported materials—glass, glass ceramic, or crystalline material[1]
Optical polishing pitch plate diameter—700 mm (27.5 in)[1]
Workholder rings—2 + 1 aluminum glass-faced workholder rings, each with an internal diameter of 224 mm (8.8 in)[1]
Drive to support plate—flat multi "V" belt running around the outside edge of the support plate[1]
Main drive motor—totally enclosed, fan cooled, 1.5 kW motor mounted on rails to allow belt adjustment[1]
Electrical service—460 volts, 60 Hz, 3 phase[1]
Machine Type—Air Bearing Optical Polishing Machine (ring lapper / planetary configuration)[1]
Support Plate Diameter—700 mm (27.5 in)[1]
Workholder Rings (Quantity & Internal Diameter)—3 aluminum glass-faced rings, each 224 mm (8.8 in) internal diameter[1]
Drive Type—Flat multi-V belt running around outside edge of support plate[1]
Main Drive Motor Power—1.5 kW[1]
Electrical Service—460 V, 60 Hz, 3 phase[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org