Waferpedia

Comparison ledger

IPEC AvantGaard 776versusAS 2000

Lam Research IPEC AvantGaard 776, SCREEN AS 2000, side by side. Every value shown is drawn from the cited encyclopedia entries.

Documented as functional equivalents— Same function class: CMP, null[1]
Side-by-side comparison of selected equipment models
Attribute
AS 2000SCREEN
OEMLam ResearchSCREEN
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLam Research IPECSCREEN AS 2000
Cited variants
  • IPEC AvantGaard 776 Tungsten[2]
  • IPEC AvantGaard 776 (Dielectric)[3]
—
Specifications
ConfigurationDielectric[1]Dual brush and top side brush chambers, spin dry[5]
CategoryCMP[3]—
MakeLam / IPEC[2]—
ModelAvantGaard 776[3]—
Wafer size8 inch[2]—
Wafer size (version)200 mm[4]—
ProcessTungsten[2]—
Asset descriptionCMP system for spares use[4]—
Gas—1:100 DHF, 1:100 NH4OH[5]
OS—Windows NT[5]
Power—0.750KVA transformer[6]
Missing—HLS cards / condition not well[6]
Wafer Size—8 inch[7]
Brush Chambers—Dual brush and top side brush chambers[5]
Spin Dry—Yes[5]
Process Gases—1:100 DHF, 1:100 NH4OH[5]
Operating System—Windows NT[5]
Vintage Year (example unit)—1998[5]
Vintage Year (another unit)—1999[6]

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Sources (7)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing
  4. [4]fabsurplus.comfabsurplus.com
  5. [5]inventory listing
  6. [6]inventory listing
  7. [7]Equipment inventory listing