Comparison ledger
Lam Research Gasonics Aura 1000, Semitool 11600 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Gasonics Aura 1000Lam Research | 11600 SRDSemitool |
|---|---|---|
| OEM | Lam Research | Semitool |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research Gasonics Aura 1000 | Semitool 11600 SRD |
| Specifications | ||
| Configuration | Tabletop (4)[1] | Ceramic[3] |
| Configurations | Tabletop (4) or Floor (1)[1] | — |
| Power Requirement | 208VAC 3-Phase[2] | — |
| Process Gases | O2, CF4[2] | — |
| Plasma Source | Microwave (magnetron)[2] | — |
| Chamber Material | Ceramic/Quartz[2] | — |
| Pneumatics Power | Nitrogen or Clean Dry Air (CDA)[2] | — |
| Manufacturer | — | Semitool[3] |
| Model | — | 11600 SRD[3] |
| Equipment type | — | Spin Rinse Dryer[3] |
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