Comparison ledger
KLA Quantox, KLA Quantox 64000 Monitoring, KLA Quantox 64100 Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | QuantoxKLA | ||
|---|---|---|---|
| OEM | KLA | KLA | KLA |
| Category | Metrology & Inspection | — | — |
| Wafer size | — | — | — |
| Process node | — | — | — |
| Introduced | — | — | — |
| Production run | — | — | — |
| Lifecycle | — | — | — |
| Lifecycle milestones | — | — | — |
| Control system | — | — | — |
| Generation | — | — | — |
| Family | KLA Quantox | KLA Quantox | KLA Quantox |
| Cited variants | — | — | |
| Specifications | |||
| Measurement principle | Non-contact, corona-based[3] | — | — |
| Measured parameters | Charge composition, interface quality, dielectric thickness, charge contamination[3] | — | — |
| Metallic contamination detection | Fe, Al, Cu, Na[3] | — | — |
| Operating system | Windows NT[3] | — | — |
| Wafer sizes supported | 200 mm, 300 mm[3] | — | — |
| Technology node | 130 nm and below[1] | — | — |
| Gate dielectric materials | SiON, high-k[1] | — | — |
| Accuracy | 0.10 Å[1] | — | — |
| Correlation with device parameters | >95%[1] | — | — |
| Technology | ACTIV[1] | — | — |
| Interface | SECS/GEM[3] | — | — |
| CE compliance | Compliant with EC Machinery, Low Voltage, and EMC directives[3] | — | — |
| Options | — | 64228[4] | — |
| Phase | — | 3 Phase[4] | — |
| Configuration | — | Refurbished[5] | Two open cassette station[6] |
| Equipment type | — | — | Measurement System[7] |
| Cassette stations | — | — | Two open[6] |
| Vintage year | — | — | 2007[6] |
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