Comparison ledger
KLA Altair 8920 Darkfield, KLA Altair 8920 i Patterned Wafer Particle Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Altair 8920 | KLA Altair 8920 |
| Specifications | ||
| Handler | x3 FOUP with 8" adaptor plates[1] | — |
| Voltage | 208 VAC[1] | 208 VAC[3] |
| Phase | 3 Phase[1] | 3 Phase[3] |
| Largest Load | 5.6[1] | — |
| Wafer Size | 8 inch[2] | — |
| Vintage | 2019[1] | — |
| Configuration | — | 50/60 Hz[4] |
| Wafer size | — | 8 inch[4] |
| Frequency | — | 50/60 Hz[3] |
| Wiring configuration | — | 5 Wire[3] |
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