Comparison ledger
KLA .498 PSL Wafer, KLA Surfscan SP 1 DLS BSIM Particle Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .498 PSL Wafer | KLA Surfscan SP 1 DLS BSIM Particle Defect |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| NIST traceability | Yes[1] | — |
| Laser Source | — | Argon Ion Laser[2] |
| Wavelength | — | 488 nm[2] |
| Defect Sensitivity | — | 0.050 µm on polished bare silicon[2] |
| Wafer Size | — | 200/300mm[2] |
| Inspection Type | — | Unpatterned surface inspection[2] |
| Handler | — | 300mm Single FOUP/FIMS (other handlers available)[2] |
| Real-Time Defect Classification | — | RTDC included[2] |
| Enhanced Rough Film Sensitivity | — | Included[2] |
| Additional Software Features | — | Defect Map and Histogram with Zoom, Map to Map[2] |
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