Waferpedia

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.204 PSL WaferversusTF 1

KLA .204 PSL Wafer, KLA TF 1, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
.204 PSL WaferKLA
TF 1KLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferKLA TF 1
Specifications
ConfigurationNIST Traceable[1]—
Wafer Size8 inch[1]—
TraceabilityNIST[2]—
Compatible ToolsSurfscan 6xy0, Sp1[1]—
NIST TraceableYes[1]—
Voltage—115V, 9A[3]
Frequency—60Hz[3]
Phase—1 Phase[3]
Current—9 A[3]
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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]inventory listing