Comparison ledger
KLA 1007, MPI TS 3500 Automatic Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1007KLA | |
|---|---|---|
| OEM | KLA | MPI |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | Wafer ID Reader |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1007 | MPI TS 3500 Automatic Wafer |
| Cited variants | — | |
| Specifications | ||
| Manufacturer | KLA[2] | MPI[4] |
| Model | 1007[2] | — |
| Description | Wafer Prober[2] | — |
| Wafer size | 150 mm[2] | Wafer ID Reader[4] |
| Convertible to 8 inch wafer size | Yes[2] | — |
| Vintage | 01.06.1995[2] | — |
| Make | KLA[3] | — |
| Equipment type | Prober[3] | — |
| Software | — | Sentio[4] |
| AST | — | RC-300 T-SA[5] |
| TS 3500 Series replaces PN | — | RC 300 T[5] |
| Category | — | Test & Probe[4] |
| Automation | — | 300 mm fully automated probe station[1] |
| Supported wafer sizes | — | 150, 200, or 300 mm[6] |
| Wafer ID-Reader | — | Option for top or bottom ID reading[6] |
| Wafer pre-aligner | — | Included[6] |
| Cassette scanner | — | Included[6] |
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