Comparison ledger
Karl Suss PM5, Semitool 11600 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | PM5Karl Suss | 11600 SRDSemitool |
|---|---|---|
| OEM | Karl Suss | Semitool |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | up to 6-inch wafers | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Karl Suss PM5 | Semitool 11600 SRD |
| Specifications | ||
| Microscope | stereo microscope[1] | — |
| Vacuum chuck | 6-inch vacuum chuck[1] | — |
| Maximum wafer size | up to 6-inch wafers[1] | — |
| Micromanipulators | 4 micromanipulators[1] | — |
| Enclosure | light-tight enclosure[1] | — |
| Use | device testing such as I-V measurements[1] | — |
| Equipment type | Probe station[1] | Spin Rinse Dryer[4] |
| Supports wafer size | up to 6-inch wafers[1] | — |
| Supports substrate size | up to 150 mm (6 in.)[2] | — |
| Applications | DC and HF measurements; device and wafer characterization tests; failure analysis; submicron probing; MEMS and opto tests[2] | — |
| Category | Wet Processing / Clean[3] | — |
| Configuration | — | Ceramic[4] |
| Manufacturer | — | Semitool[4] |
| Model | — | 11600 SRD[4] |
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