Comparison ledger
Hitachi HT7700, KLA 0035235-003 MMD Head, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | HT7700Hitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi HT7700 | KLA 0035235-003 MMD Head |
| Cited variants |
| — |
| Specifications | ||
| Type | Transmission Electron Microscope (TEM)[2] | — |
| Electron emitter type | LaB6[1] | — |
| Accelerating voltage range | 40 kV to 120 kV[1] | — |
| Point resolution | 0.204 nm[1] | — |
| Line resolution | 0.144 nm at 120 kV (with EXALENS)[1] | — |
| Magnification range (high-contrast mode) | ×200 to ×200,000[3] | — |
| Stage tilt range | ±70°[3] | — |
| Camera | 8 MP CCD (Peltier cooled, EXALENS model: AMT XR81B)[1] | — |
| Vacuum system | Oil-free turbo-molecular pumping[3] | — |
| Objective lens system | Double gap objective lens (High-Contrast and High-Resolution modes)[1] | — |
| Stage type | Motorized eucentric side-entry goniometer[3] | — |
| STEM detector | Bright Field / Dark Field, tomography capable[1] | — |
| Type of emitter | LaB6 electron gun[1] | — |
| Acceleration voltage range | 40 kV to 120 kV[1] | — |
| Line (lattice) resolution | 0.144 nm at 120 kV with EXALENS[1] | — |
| Magnification range | ×200–×200,000 (high-contrast mode)[3] | — |
| Detectors | CCD camera, STEM detector (Bright Field / Dark Field), Tomography[1] | — |
| Configuration | — | TSTD PCB ASSY, MMD MEAS HEAD[4] |
| Model | — | 0035235-003[4] |
| Make | — | KLA[4] |
| Part Description | — | TSTD PCB ASSY, MMD MEAS HEAD[4] |
| Compatible System | — | KLA AIT-XP[4] |
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