Waferpedia

Comparison ledger

1305 BSG 3versusSS W 80 A-AVR Wafer

Hitachi 1305 BSG 3, SCREEN SS W 80 A-AVR Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1305 BSG 3Hitachi
OEMHitachiSCREEN
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHitachi 1305 BSG 3SCREEN SS W 80
Specifications
Phase—1 Phase[1]
Voltage—208 V[1]
Frequency—60 Hz[1]
Configuration—3 Wire[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing