Comparison ledger
Hitachi 1305 BSG 3, SCREEN 80 B 2 F 2 B, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | 80 B 2 F 2 BSCREEN |
|---|---|---|
| OEM | Hitachi | SCREEN |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | SCREEN SK 80 |
| Specifications | ||
| Configuration | — | with Nano spray[1] |
| OEM | — | SCREEN / DNS[1] |
| Model | — | 80 B 2 F 2 B[1] |
| Equipment type | — | Scrubber[1] |
| Process features | — | Nano spray; brush (only front)[1] |
Plan your fab
Building a Wet Processing / Clean process? Get a complete equipment list.
Open the fab equipment planner →