Comparison ledger
Heller 1088, Varian HS 20 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1088Heller | HS 20 DiffusionVarian |
|---|---|---|
| OEM | Heller | Varian |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Heller 1088 | Varian HS 20 Diffusion |
| Specifications | ||
| Heating Zones | 8 zones (4 top and 4 below) plus 1 cooling zone[1] | — |
| Heating Method | Forced convection[1] | — |
| Conveyor Width | 18 inches (45 cm)[1] | — |
| Heated Length | 43.5 inches (111 cm)[1] | — |
| Overall Length | 96 inches (244 cm)[1] | — |
| Height | 50 inches (127 cm)[1] | — |
| Net Weight | 900 lbs (409 kg)[1] | — |
| Thermal Profiler | Included[1] | — |
| Oven Top | Counter balance for easy access to conveyor[1] | — |
| Solder Compatibility | Lead-free and leaded soldering[1] | — |
| Model | — | HS 20[2] |
| Type | — | Diffusion pump[3] |
| Cooling method | — | Water-cooled[3] |
| Pumping speed, maximum, air | — | 17,500 l/s[4] |
| Pumping speed, maximum, helium | — | 22,000 l/s[4] |
| Inlet flange | — | 20" ASA[5] |
| Foreline flange | — | ISO63-K[5] |
| Power | — | 480 VAC, 3-Ø[5] |
| Oil capacity | — | 4.70 liters[5] |
| Weight | — | 264 kg[5] |
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