Comparison ledger
EV Group 101, SUSS MicroTec MA 150 E, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 101EV Group | MA 150 ESUSS MicroTec |
|---|---|---|
| OEM | EV Group | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | EV Group 101 | SUSS MicroTec MA 150 |
| Specifications | ||
| OEM | EV Group[1] | — |
| Model | 101[1] | — |
| Equipment name | EVG 101 Spray Coater[1] | — |
| NEMO ID | evgspraycoat[1] | — |
| Training required | EVG 101 Training[1] | — |
| Training duration | 1.50 hours[1] | — |
| Processing technique | Resist Spray Coat (manual)[1] | — |
| Cleanliness | "All"[1] | — |
| Location | SNF Paul G Allen L107 Cleanroom[1] | — |
| Wafer diameter (substrate size) | up to 300 mm[2] | — |
| Available modules | Spin coat / OmniSpray® / develop[2] | — |
| Wafer handling options | Bowed / warped / thin wafer handling, edge handling[2] | — |
| Dispense options | Various resist dispense pumps covering viscosities up to 52000 cP; constant pressure dispense systems; EBR / BSR / pre-wet / bowl wash / liquid priming[2] | — |
| Processing technique (at SNF) | Resist Spray Coat (manual)[3] | — |
| Cleanliness group (at SNF) | "All"[1] | — |
| Configuration | — | Refurbished[4] |
| Wafer size | — | 150mm (6 inch)[5] |
| Exposure optics | — | UV400 (365nm/405nm)[6] |
| Lamphouse power | — | 1000 Watt[7] |
| Alignment accuracy | — | < 1.0 µm[6] |
| Operating system | — | Windows 2000[7] |
| Power supply | — | CIC1200[6] |
| Microscope | — | DVM6 Microscope[7] |
| Prealigner type | — | XRS[6] |
| Exposure modes | — | Hard, Soft, Proximity, Vacuum Contact[7] |
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