Comparison ledger
Espec HRS-1800HS-20, KLA 1007, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | HRS-1800HS-20Espec | 1007KLA |
|---|---|---|
| OEM | Espec | KLA |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Espec HRS-1800HS-20 | KLA 1007 |
| Specifications | ||
| OEM | Espec[1] | — |
| Model | HRS-1800HS-20[1] | 1007[2] |
| Category | rapid-rate thermal cycle chamber[1] | — |
| Temperature and humidity range | −70°C to +180°C / 20%rh to 98%rh[1] | — |
| Temperature change rate | 20°C/min[1] | — |
| Interior dimensions (W×H×D) | 1500×1200×1000 mm[1] | — |
| Manufacturer | — | KLA[2] |
| Description | — | Wafer Prober[2] |
| Wafer size | — | 150 mm[2] |
| Convertible to 8 inch wafer size | — | Yes[2] |
| Vintage | — | 01.06.1995[2] |
| Make | — | KLA[3] |
| Equipment type | — | Prober[3] |
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