Waferpedia

Comparison ledger

1034versusPM5

Electroglas 1034, SUSS MicroTec PM5, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1034Electroglas
PM5SUSS MicroTec
OEMElectroglasSUSS MicroTec
CategoryTest & ProbeTest & Probe
Wafer size—150mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyElectroglas 1034SUSS MicroTec PM5
Specifications
system type—analytical probe system[1]
wafer/substrate diameter—up to 150 mm (6″)[1]
measurement modes—DC and HF measurements[1]
failure analysis use—suitable as a failure analysis tool[1]
probe heads—up to 12 SUSS probe heads at one time[1]
manipulator probe function—nanowires may be picked and placed onto a device or substrate[1]
Measurement types—DC and HF[1]
Max probe heads—up to 12 SUSS probe heads[1]
Manipulator probe—for nanowire pick-and-place[1]
Wafer/substrate diameter—up to 150 mm (6 in)[1]
Failure analysis—suitable as a failure analysis tool[1]
Contact points—up to 4 contact points can be operated independently at the same time[2]

Plan your fab

Building a Test & Probe process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]uwaterloo.cauwaterloo.ca
  2. [2]polifab.polimi.itpolifab.polimi.it