Waferpedia

Comparison ledger

DFP 8160 Fully Automatedversus12 Lapper

Disco DFP 8160 Fully Automated, Lapmaster 12 Lapper, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
12 LapperLapmaster
OEMDiscoLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco DFP 8160 Fully Automated—
Specifications
ManufacturerDisco[1]—
ModelDFP 8160[1]—
Tool typeFully automated polisher[1]—
CategoryCMP[2]—
Wafer size8-inch to 12-inch wafers[3]—
Outside plate diameter—12 inches[4]
Lapping Speed Range—0 to 60 rpm[5]
Wafer Size Compatibility—4 inches or smaller[4]
Input Voltage—110 V[4]
Frequency—60 Hz[4]
Phase—1[4]
Number of Rings—3[4]
Number of Weights—3[4]
Includes Slurry System—Yes[4]
Includes Timer—Yes[4]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]jmind.comjmind.com
  5. [5]etd.ohiolink.eduetd.ohiolink.edu