Waferpedia

Comparison ledger

DFL7340-stealth-dicerversusXB8

Disco DFL7340-stealth-dicer, SUSS MicroTec XB8, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
XB8SUSS MicroTec
OEMDiscoSUSS MicroTec
CategoryPackaging & BondingPackaging & Bonding
Wafer size200mm200mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco DFL7340-stealth-dicerSUSS MicroTec XB8
Specifications
OEMDisco[1]—
ModelDFL7340[1]—
Process areaPackaging[1]—
Compatible materialsDedicated to dicing Si wafers only[1]—
Laser engine wavelengthλ = 1342 nm[1]—
Maximum sample diameter200 mm[1]—
Dicing orientationTopside or backside (through tape) dicing possible[1]—
Si resistivity requirementρ > 0.01 Ω•cm[1]—
Surface roughness requirementDicing streets must be smooth (mirror polish) on the surface where the laser is incident[1]—
Street clearance requirementWafer must be metal-free in a width 0.4 × substrate thickness, centred on the dicing street[1]—
Wafer size (max)—200 mm[2]
Automation—Semi-automated[2]
Process—High-Force Wafer Bonding[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]confluence.nanofab.ualberta.caconfluence.nanofab.ualberta.ca
  2. [2]hilpert.chhilpert.ch