Waferpedia

Comparison ledger

321versusMWS-44SN

Disco 321, Takatori MWS-44SN, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
321Disco
MWS-44SNTakatori
OEMDiscoTakatori
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco 321Takatori MWS-44SN
Specifications
OEMDisco[1]—
Model321[1]—
Equipment typeWafer Dicing Saw[1]Multi Wire Saw[4]
Facility contextCleanroom Instrumentation[1]—
Application areaNano and Micro Fabrication[1]—
LocationFNT 4.106[1]—
Wafer SizeUp to 6 inches[2]—
Spindle Power1.0 kW Synchro Spindle (or 1.5 kW Synchro Spindle in some configurations)[3]—
Spindle Power (alternate)1500 Watt spindle[2]—
Non-Contact SetupNon Contact Setup[3]—
MicroscopeMicroscope With Eyepiece and Shutter (or Dual Objective Microscope With Eyepiece)[3]—
Broken Blade DetectionBroken Blade Detection[3]—
Light TowerIncludes Light Tower[3]—
Chuck Type6" Universal Chuck (or 6" Porous Film Frame Chuck)[2]—
Wafer size capabilityUp to 6" wafers[3]—
Chuck6-inch porous film frame chuck[2]—
Spindle power1500-watt spindle[2]—
FootprintSmall footprint[2]—
SetupNon-contact setup[3]—
Blade break detectionBroken blade detection[3]—
Other featuresFloppy drive, light tower, blade tools, manuals[3]—
Product line—MWS[4]
Process category—Slicing and grinding[4]
Machine type—Multi wire saw[4]
Rocking motion-slicing mechanism—Allows easier abrasive outlet and smoothness of cutting surface to simplify subsequent processes[5]
Slurry supply—Effective lapping with slurry supplied from the nearest nozzle to the works for uniform and precise cutting[5]
Wire control—Direct drive system[5]
Wire control benefit—Saves space and allows speedy cutting[5]
Wire tension control—Electric control with stable wire tension[5]
Control method—Microcomputer-controlled cutting conditions for various work pieces[5]
Cutting recipes—60 cutting recipes settable[5]
Wire winding—Automatic wire winding[5]
Slurry compatibility—Diamond slurry compatible[5]
Listed materials—Sapphire, SiC, GaN, Quartz Crystal, Ceramic[6]

Plan your fab

Building a Dicing & Grinding process? Get a complete equipment list.

Open the fab equipment planner →
Sources (6)Every fact above is drawn from these public sources
  1. [1]tmi.utexas.edutmi.utexas.edu
  2. [2]jmind.comjmind.com
  3. [3]gtsaz.comgtsaz.com
  4. [4]takatori-g.co.jptakatori-g.co.jp
  5. [5]takatori-g.co.jptakatori-g.co.jp
  6. [6]diagon.aidiagon.ai