Comparison ledger
Disco 321, Disco DFD 6450 Fully Automatic Dicing, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 321Disco | |
|---|---|---|
| OEM | Disco | Disco |
| Category | Dicing & Grinding | Dicing & Grinding |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Disco 321 | Disco DFD 6450 Fully Automatic Dicing |
| Specifications | ||
| OEM | Disco[1] | — |
| Model | 321[1] | — |
| Equipment type | Wafer Dicing Saw[1] | — |
| Facility context | Cleanroom Instrumentation[1] | — |
| Application area | Nano and Micro Fabrication[1] | — |
| Location | FNT 4.106[1] | — |
| Wafer Size | Up to 6 inches[2] | — |
| Spindle Power | 1.0 kW Synchro Spindle (or 1.5 kW Synchro Spindle in some configurations)[3] | — |
| Spindle Power (alternate) | 1500 Watt spindle[2] | — |
| Non-Contact Setup | Non Contact Setup[3] | — |
| Microscope | Microscope With Eyepiece and Shutter (or Dual Objective Microscope With Eyepiece)[3] | — |
| Broken Blade Detection | Broken Blade Detection[3] | — |
| Light Tower | Includes Light Tower[3] | — |
| Chuck Type | 6" Universal Chuck (or 6" Porous Film Frame Chuck)[2] | — |
| Wafer size capability | Up to 6" wafers[3] | — |
| Chuck | 6-inch porous film frame chuck[2] | — |
| Spindle power | 1500-watt spindle[2] | — |
| Footprint | Small footprint[2] | — |
| Setup | Non-contact setup[3] | — |
| Blade break detection | Broken blade detection[3] | — |
| Other features | Floppy drive, light tower, blade tools, manuals[3] | — |
| Max workpiece size | — | φ8 inch[4] |
| X-axis cutting range | — | 250 mm[4] |
| Cutting speed | — | 0.1 – 600 mm/s[4] |
| Y1-axis cutting range | — | 250 mm[4] |
| Y1-axis index step | — | 0.0001 mm[4] |
| Y1-axis positioning accuracy | — | Within 0.003/250 mm (single error)[4] |
| Y2-axis cutting range | — | 30 mm[4] |
| Y2-axis index step | — | 0.0001 mm[4] |
| Y2-axis positioning accuracy | — | Within 0.002/30 mm[4] |
| Z-axis max stroke | — | 35.2 mm[4] |
| Z-axis moving resolution | — | 0.00005 mm[4] |
| Z-axis repeatability accuracy | — | 0.001 mm[4] |
| θ-axis max rotating angle | — | 380 deg[4] |
| Spindle rated output (1.0 kW) | — | 1.0 kW[4] |
| Spindle rated torque (1.0 kW standard) | — | 0.16 N·m[4] |
| Spindle rotation speed range (1.0 kW standard) | — | 6,000 – 60,000 min⁻¹[4] |
| Spindle rated output (2.2 kW) | — | 2.2 kW[4] |
| Spindle rated torque (2.2 kW) | — | 0.7 N·m[4] |
| Spindle rotation speed range (2.2 kW) | — | 3,000 – 30,000 min⁻¹[4] |
| Equipment dimensions (W×D×H) | — | 1,120 × 1,500 × 1,600 mm[4] |
| Equipment weight | — | Approx. 1,400 kg[4] |
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