Comparison ledger
CEE 100 Spin, Tegal Plasmaline 411, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 100 SpinCEE | Plasmaline 411Tegal |
|---|---|---|
| OEM | CEE | Tegal |
| Category | Resist Processing | Resist Processing |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | CEE 100 | Tegal Plasmaline 411 |
| Specifications | ||
| Configuration | Volts 115[1] | — |
| manufacturer | — | Tegal[2] |
| model | — | Plasmaline 411[2] |
| equipment type | — | Plasma asher[2] |
| listed descriptions | — | Asher; plasma oven; AR O2 etcher[2] |
Plan your fab
Building a Resist Processing process? Get a complete equipment list.
Open the fab equipment planner →