Comparison ledger
Brooks 017-0146-01 Prealigner, Heidelberg Instruments DWL66, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | DWL66Heidelberg Instruments |
|---|---|---|
| OEM | Brooks | Heidelberg Instruments |
| Category | Lithography | Lithography |
| Wafer size | — | 6" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | Heidelberg Instruments DWL66 |
| Cited variants | — |
|
| Specifications | ||
| Resolution | — | 40 nm, 100 nm, 200 nm, 400 nm[2] |
| Minimum feature | — | 0.5 µm[2] |
| Laser sources | — | 244 nm, 363 nm, 413 nm, 442 nm[2] |
| Substrates | — | glass, silicon or any other flat materials[2] |
| Exposure | — | photoresist[2] |
| Image size | — | 140 mm x 140 mm[2] |
| Substrate size | — | up to 200 mm by 200 mm[1] |
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