Comparison ledger
Brooks 017-0024-01 Prealigner, EV Group EV-420, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0024-01 PrealignerBrooks | EV-420EV Group |
|---|---|---|
| OEM | Brooks | EV Group |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0024-01 Prealigner | EV Group EV-420 |
| Specifications | ||
| Equipment type | — | front & backside mask aligner[1] |
| Type | — | Front & backside mask aligner[2] |
| Exposure source | — | UV[3] |
| Exposure dose (as stated) | — | 625 mJ/cm²[3] |
| UV source intensity | — | 625 mJ/cm² (measured during exposure)[3] |
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