Waferpedia

Comparison ledger

0 V 500versus1700EXL

Blue M 0 V 500, Heller 1700EXL, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 V 500Blue M
1700EXLHeller
OEMBlue MHeller
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 0 V 500Heller 1700EXL
Cited variants—
  • Heller 1500EXL[1]
  • Heller 1800EXL[1]
  • Heller 1900EXL[1]
Specifications
Series—EXL Series[1]
Heating zones—Six heating zones[1]
Cooling zones—One internal cooling zone[1]
Profiling—Five thermocouple profiling[1]
Maximum line speed—Up to 32 inches (80 cm) per minute[1]
Control software—Enhanced Windows-based software[1]
Integrated profiling—Integrated KIC thermal profiling[1]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org