Waferpedia

Comparison ledger

0 500versusPB6-2P-CP

Blue M 0 500, YES PB6-2P-CP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 500Blue M
OEMBlue MYES
CategoryThermal / DiffusionThermal / Diffusion
Wafer size—5 in, 6 in, or 4 in wafers
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 0 500YES PB6-2P-CP
Specifications
ManufacturerBlue M[1]—
Model0 500[1]YES-PB-6-2P-CP[2]
Asset number139866[1]—
Last confirm dateSeptember 10, 2025[1]—
Equipment typeOven[1]—
Product line—YES 450PB Bake Ovens[2]
Process type—High temperature vacuum bake/cure ovens for BCB/Polyimide[2]
Maximum operating temperature—Up to 450°C[2]
Wafer capacity—2 cassettes of 5" or 6" wafers, or 3 cassettes of 4" wafers[2]
Chamber material—316L SS[2]
Oven chamber size—10.75 in ID x 22.2 in deep x 7.5 in H[2]
Controller—CTC controller with color touchscreen[2]
Control features—Multiple PIDs[2]
Uniformity at dwell—+1 / -3.5°C[2]
Recipes—Eight separate recipes with up to 16 ramps and dwells in each recipe[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]web.archive.orgweb.archive.org