Comparison ledger
Axcelis GSD 200 E 2 High Current, Varian E 500 High Current, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | GSD 200 E 2 High CurrentAxcelis | E 500 High CurrentVarian |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis GSD 200 | Varian E 500 High Current |
| Cited variants |
| — |
| Specifications | ||
| Software Version | VM 8.0 (Virtual Machine)[1] | — |
| CIM | SECs[1] | — |
| Process | B11, BF2, As, P[1] | — |
| Handler System | Arm (Non HPES), In Air Handler[1] | — |
| Factory Interface | None[1] | — |
| Option System | Silicon Disk, SEF EGUN[1] | — |
| Configuration | Blade Server 120006095C Excluded[1] | System Vacuum:[4] |
| Process Species | B11, BF2, As, P[1] | — |
| Vintage | 2001[1] | — |
| Disk Drive | Direct-Drive[2] | — |
| Dose Type | Regular[2] | — |
| Source Type | ELS4 IHC-Source without Vaporizer[2] | — |
| Main Workstation | SUN Solaris AXI 3HE (special case)[2] | — |
| Second Workstation | SUN Sparc5 on cart with printer[2] | — |
| CIM Interface | SECs[1] | — |
| Wafer Size | 8 inch[1] | — |
| High Voltage Transformer | both Oil/Light[2] | — |
| Tower Color | red/yellow/green; no buzzer[2] | — |
| Network | 24-port 100MB Ethernet with Cisco Router[2] | — |
| Kit Cell Controller | 177[2] | — |
| Options | Accel-Highvoltage Probe installed, HPES-Upgrade installed[2] | — |
| Signal Tower | — | Front (Red, yellow, green)[4] |
| Production Wafer Qty' | — | 1 wafer (single platen)[4] |
| Platen Type | — | Electrostatic Clamp[4] |
| Loadloack | — | Left/Right 2 Chambers[4] |
| S/w version | — | 13.30 Rev C[4] |
| Implant Monitor | — | LCD Touchscreen[4] |
| Service Monitor | — | LCD Touchscreen[4] |
| Ion Source Chambe | — | CCIG/Torr[4] |
| Beamline Chamber | — | CCIG/Torr[4] |
| End Station Chamber | — | CCIG/Torr[4] |
| Source Dry Punp | — | iQDP 80[4] |
| Stage Pump | — | iQDP 80+QMB 500[4] |
| Loadlock Rough Pump | — | iQDP 80[4] |
| Loadlock Turbo Pump | — | CT 4 L & CT 4 R: P/N: 8108998G001 & 8108999G001[4] |
| Process Chamber | — | CT 250 P/N: 8039113[4] |
| Source Turbo Pump | — | Pfeiffer TPH 1201 P / P/N: PMP 03702[4] |
| Resolver Turbo Pump | — | Pfeiffer HiPace 300[4] |
| Beamline Turbo Pump | — | Pfeiffer HiPace 700Gas Box Upgrade:[4] |
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