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200 PCUversusNV GSD 200 E 2 Ion

Axcelis 200 PCU, Axcelis NV GSD 200 E 2 Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
200 PCUAxcelis
NV GSD 200 E 2 IonAxcelis
OEMAxcelisAxcelis
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones2000 Vintage—
Control system——
Generation——
FamilyAxcelis NV GSD 200Axcelis NV GSD 200
Cited variants
  • Fusion 200 PCU[1]
  • Fusion 200 PCU-P[2]
—
Specifications
P/NSC 4840 A[3]—
Frequency50 Hz[3]—
Phase3 Phase[3]—
Voltage400 V[3]208V[5]
Cryo-Pumps—CTI/Edwards Onboard; OB-8 + OB-10 fully refurbished[4]
Cryo-Kompressor—CTI 9650 Low-Voltage[4]
Turbo-Pumps—Seiko STP A 2203 fully refurbished[4]
Terminal-Rough-Pump—without (Edwards IGX Config)[4]
End station Rough-Pump—without (Edwards IGX Config) bottom remote external[4]
Gas box—5-String, 4x 2L Low-Pressure[4]
String 1—Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3[4]
String 2—BF3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3; PN:10010380[4]
String 3—Ash3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3; PN:10010380[4]
String 4—Ph3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3; PN:10010380[4]
String 5—Argon Carriergas; MFC Brooks GF120 10sccm-N2[4]
Disk-Drive—Direct-Drive[4]
Dose-Type—Regular[4]
Source-Type—ELS4 IHC-Source without Vaporizer[4]
High voltage-Transformer—Oil[4]
Light-Tower—red/yellow/green; no buzzer[4]
Main-Workstation—SUN Solaris AXI 3HE (special case)[4]
Software-Version—6.13.5.1 (no license included)[4]
Network—24 port 100MB Ethernet with Cisco Router-Kit[4]
Cell-Controller—V6 Type[4]
Energy Config—0 - 160Kv High current[5]
CE-Conformity—Yes[5]
200 PCU entryNV GSD 200 E 2 Ion entryAsk about these tools →Share experience with this comparison →

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Sources (5)Every fact above is drawn from these public sources
  1. [1]exapro.comexapro.com
  2. [2]fabsurplus.comfabsurplus.com
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]inventory listing