Comparison ledger
Axcelis 200 ACU, Tokyo Electron TE 8500, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | TE 8500Tokyo Electron |
|---|---|---|
| OEM | Axcelis | Tokyo Electron |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Tokyo Electron TE 8500 |
| Cited variants | — | |
| Specifications | ||
| Configuration | Parts Machine[2] | — |
| Manufacturer | Axcelis[2] | — |
| Model | 200 ACU[2] | — |
| Tool type | Asher[2] | — |
| Wafer size | 200mm[4] | 6 inch[1] |
| Serial number | AU6A356AH[4] | — |
| Computer system | M 200 PC, M 200[5] | — |
| Part number | SC 4572 A[5] | — |
| Volts | 208[5] | — |
| Amps | 30[5] | — |
| Equipment type | Asher[2] | — |
| Wafer configuration | 8 inch[3] | — |
| Process type | — | Etch (Dry)[7] |
| Chambers (PESC Dry) | — | 1[1] |
| Application (PESC Dry) | — | Oxide etch with endpoint capability[1] |
| Vintage | — | 1994[7] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →