Comparison ledger
ASM Epsilon 2000, Temescal SuperSweep64, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Epsilon 2000ASM | SuperSweep64Temescal |
|---|---|---|
| OEM | ASM | Temescal |
| Category | Deposition | Deposition |
| Wafer size | 150mm | 150mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2005 Third-party support only |
| Control system | — | — |
| Generation | — | — |
| Family | ASM Epsilon | Temescal SuperSweep64 |
| Specifications | ||
| Supply Voltage/ Freq | 480/ 50[1] | — |
| System Hand | Right Hand[1] | — |
| Monitor Type | Flat Panel[1] | — |
| Wafer Size | 150mm[1] | — |
| Maint Console | Mini Maint[1] | — |
| CPU | 68040[1] | — |
| Software Version | 7.65[1] | — |
| Comms | HSMS[1] | — |
| RP/ ATM | RP[1] | — |
| Vacuum Load Locks | No[1] | — |
| WHC Gate Valve | Swing[1] | — |
| WHC Robot Arm | Wide[1] | — |
| Reactor Isolation | HVA[1] | — |
| ATM Valve | VAT[1] | — |
| Pressure Controller | MKS 152 Analogue[1] | — |
| PCV Type | MKS 253B[1] | — |
| Choke Valve | Yes[1] | — |
| RP Orientation | Bottom Feed[1] | — |
| Gas Panel Orientation | Top Feed[1] | — |
| Main H2/N2 | 100slm[1] | — |
| Process type | CVD (Chemical Vapor Deposition)[1] | — |
| Wafer sizes supported | 150 mm and 200 mm wafers[3] | — |
| Tool type | single-wafer epitaxy tool[3] | — |
| Supply voltage/frequency | 480/50[1] | — |
| controller type | — | programmable beam sweep controller[4] |
| system association | — | listed under the FC-4400 system's electron beam source, power supply, and sweep section[4] |
| wafer capacity referenced in associated system | — | 30 150 mm wafers per load[4] |
| Type | — | programmable beam sweep controller[4] |
| Operation | — | fully digital operation[5] |
| Internal waveform storage | — | up to 64 patterns[5] |
| Addressable points | — | 1024[5] |
| Waveform types | — | sine, triangle, saw-tooth, clipped, and arbitrary[5] |
| Frequency range | — | 1 to 200 Hz[5] |
| Max. sweep current | — | -4 A to +4 A[5] |
| Power requirements | — | 100–240 V ac, 50–60 Hz[5] |
| Computer I/O ports | — | RS-232 and RS-485[5] |
| Compatible system | — | Temescal FC-4400 deposition system[6] |
| Compatibility | — | Compatible with almost any commercially available e-beam gun[7] |
| Waveform resolution | — | 8 bits (0.4%)[7] |
| Weight | — | 10 lbs[7] |
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