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Comparison ledger

SEMVision G 2 CD-SEMversus.204 PSL Wafer

Applied Materials SEMVision G 2 CD-SEM, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
SEMVision G 2 CD-SEMApplied Materials
OEMApplied MaterialsKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials SEMVisionKLA .204 PSL Wafer
Specifications
ConfigurationWith EDX (Energy Dispersive X-ray Spectroscopy)[1]NIST Traceable[3]
Largest Load8 A[1]—
Full Load Current10 A[1]—
ManufacturerApplied Materials[2]—
ModelSEMVision G 2[1]—
Tool typeCD-SEM (Critical Dimension Scanning Electron Microscope)[2]—
CategoryMetrology & Inspection[2]—
Wafer size12 inch[1]—
EDXIncluded[1]—
HDD and softwareIncluded[2]—
Wafer Size—8 inch[3]
Traceability—NIST[4]
Compatible Tools—Surfscan 6xy0, Sp1[3]
NIST Traceable—Yes[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com