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Comparison ledger

P5000versusSimba2

Applied Materials P5000, Temescal Simba2, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
P5000Applied Materials
Simba2Temescal
OEMApplied MaterialsTemescal
CategoryDepositionDeposition
Wafer size150mm150mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials P5000Temescal Simba2
Specifications
Process typeDielectric PECVD[1]—
Dedicated chambersTwo[1]—
Silicon dioxide chemistryTEOS/O2[1]—
Silicon nitride chemistrySiH4/NH3 capable[1]—
Maximum wafer size8 inches[1]—
Film thicknessMultiple microns thick[1]—
Nominal operating temperature~400C[1]—
Number of chambers2[1]—
Chemistry for silicon dioxideTEOS/O2[1]—
Chemistry for silicon nitrideSiH4/NH3[1]—
Deposited film thicknessMultiple microns[1]—
Operating temperature~400°C[1]—
Power supply—15-kW Temescal Simba2[2]
System association—Listed as an upgrade option for FC-4400[2]
Power rating—15 kW[5]
Product type—Power supply[6]
Function—E-beam power supply[7]
Associated systems—FC-4400, UEFC-5700, FC/BCD-2800[8]
Manufacturer—Temescal[6]

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Sources (8)Every fact above is drawn from these public sources
  1. [1]cmdis.rpi.educmdis.rpi.edu
  2. [2]web.archive.orgweb.archive.org
  3. [3]web.archive.orgweb.archive.org
  4. [4]web.archive.orgweb.archive.org
  5. [5]waferpedia.comwaferpedia.com
  6. [6]semi-sps.comsemi-sps.com
  7. [7]semi-sps.comsemi-sps.com
  8. [8]waferpedia.comwaferpedia.com