Comparison ledger
Applied Materials Mirra Mesa, Lapmaster 72, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Mirra MesaApplied Materials | 72Lapmaster |
|---|---|---|
| OEM | Applied Materials | Lapmaster |
| Category | CMP | CMP |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials Mirra Mesa | Lapmaster 72 |
| Cited variants |
| |
| Specifications | ||
| CMP Model | Mirra Mesa[6] | — |
| Process | OX[6] | — |
| Polisher System Module | 4 Head 3 Platen[6] | — |
| Configuration | Platen 1 configuration:[6] | 27" ID Rings[4] |
| Platen 1 Type | With window, belt + gear CVT[6] | — |
| Platen 1 endpoint | Full scan and motor torque[6] | — |
| Platen 1 slurry arm | Standard tunable[6] | — |
| Platen 1 pad conditioner arm | Standard[6] | — |
| Platen 2 Type | With window, belt + gear CVT[6] | — |
| Platen 2 endpoint | Full scan[6] | — |
| Platen 2 slurry arm | Standard tunable[6] | — |
| Platen 2 pad conditioner arm | Standard[6] | — |
| Platen 3 Type | With window, belt + gear CVT[6] | — |
| Platen 3 endpoint | Full scan[6] | — |
| Platen 3 slurry arm | Standard tunable[6] | — |
| Platen 3 pad conditioner arm | Standard[6] | — |
| Polishing head | 3 zone[6] | — |
| Slurry Delivery | 2 types of slurry[6] | — |
| Model | Mirra Mesa[6] | 72[4] |
| Category | CMP (Chemical Mechanical Polisher)[6] | — |
| Slurry flow rate control | Peristaltic pump[6] | — |
| FABs port | 3 Port[6] | — |
| Electrical requirements | 50/60 HZ; 200-230V; three-phase four-wire[6] | — |
| Cleaner quantity | 1 unit[6] | — |
| Cleaner robot | working beam Megasonics Module[6] | — |
| Cleaning method | Vertical[6] | — |
| Megasonics delivery type | 2 Chem flow meter type[6] | — |
| Brush 1 clean | 1 Chem and DIW[6] | — |
| Brush 1 flow type | flow meter type[6] | — |
| Brush 2 clean | 1 Chem and DIW[6] | — |
| Brush 2 flow rate | flow meter type[6] | — |
| Dry type | Spin Dryer[6] | — |
| Drying | Lamp heater Drying; N2 Drying[6] | — |
| Line Frequency | 50/60 HZ[6] | — |
| OEM | Applied Materials[6] | — |
| Facilities option | EMO Guard Ring[6] | — |
| Line voltage | 200-230V[6] | — |
| Connection | Three-phase four-wire[6] | — |
| Power lamp | Green Lamp[6] | — |
| Power connected lamp | Power Connected Lamp[6] | — |
| GFI type | STANDARD 30mA[6] | — |
| Voltage | — | 480 V[4] |
| Plate Diameter | — | 72 inches (1829 mm)[5] |
| Number of Conditioning Rings | — | 4[3] |
| Ring Inside Diameter | — | 27.25 inches (692 mm)[5] |
| Standard RPM | — | 30[5] |
| RPM Range (Variable Speed Drive) | — | 5–32[5] |
| Drive Motor (Lapper) | — | 20 HP / 15 kW[5] |
| Drive Motor (alternate listing) | — | 25 HP[1] |
| Working Height | — | 36 inches (914 mm)[5] |
| Dimensions (Open Face) | — | 100 inches x 110 inches x 63 inches (2540 mm x 2794 mm x 1600 mm)[5] |
| Dimensions (Pneumatic Lift) | — | 124 inches x 110 inches x 108 inches (3150 mm x 2794 mm x 2743 mm)[5] |
| Est. Shipping Weight (Open Face) | — | 15,000 lbs (6804 kg)[5] |
| Est. Shipping Weight (Pneumatic Lift) | — | 20,000 lbs (9072 kg)[5] |
| Ring Height | — | 4.0 inches[1] |
| Plate Thickness | — | 1-5/8 inches[1] |
| Machine type | — | Polisher[4] |
| Plate diameter | — | 72 in[5] |
| Conditioning rings | — | 4[3] |
| Ring ID | — | 27.25 in[5] |
| Ring size | — | 27" ID rings[4] |
| Speed range | — | 5-32 RPM[4] |
| RPM range with variable speed drive | — | 5-32[5] |
| Drive motor | — | 25 HP[4] |
| Version | — | Open Face[3] |
| Overall dimensions, Open Face | — | 100 in x 110 in x 63 in H[5] |
| Weight, Open Face | — | 15,000 lbs[5] |
| Serial number | — | 7200010[1] |
| Year stated in source | — | 2001[1] |