Comparison ledger
Applied Materials Complus MP Patterned Wafer, KLA 1.112 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Complus MP Patterned WaferApplied Materials | |
|---|---|---|
| OEM | Applied Materials | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | KLA 1.112 PSL Wafer |
| Cited variants |
| — |
| Specifications | ||
| Manufacturer | Applied Materials[2] | — |
| Model | Complus MP[3] | — |
| Category | Metrology & Inspection[2] | — |
| Description | Patterned wafer inspection system[1] | — |
| Factory interface | 200 mm OPEN Cassette Adaptor[1] | — |
| System options | SECS/GEM + HSMS[1] | — |
| Tool type | Patterned wafer inspection system[2] | — |
| Configuration | — | NIST Traceable[4] |
| Wafer Size | — | 8 inch[4] |
| NIST Traceable | — | True[4] |
| Compatible Tools | — | Surfscan 6xy0 and Sp1[5] |
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