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Comparison ledger

9500 XR IonversusNV 8250 HT Ion

Applied Materials 9500 XR Ion, Axcelis NV 8250 HT Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Documented as functional equivalents— Same function class: Ion Implantation, Unknown[1]
Side-by-side comparison of selected equipment models
Attribute
9500 XR IonApplied Materials
OEMApplied MaterialsAxcelis
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials PI 9500Axcelis NV 8250
Specifications
ConfigurationHigh Current[2]50/60 Hz[1]
GasBF3, AS, P[2]—
Wafer size8 inch[2]—
Current typeHigh current[3]—
Dopant gasesBF3, AS, P[2]—
Vintage year1996[2]—
FamilyPI 9500[3]—
Voltage—208 VAC[4]
Phase—3 Phase[4]
Power—36 kVA[1]
Input Breaker—100 A[4]
Largest Load—88 A[4]
Max. Interrupt Capacity—85 A[4]
Wafer Size—8 inch[1]
Frequency—50/60 Hz[4]
Category—Ion Implantation[4]
OEM—Axcelis[1]
Model—NV 8250 HT[1]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]waferpedia.comwaferpedia.com