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0041-26723 Bonded Assemblyversus540

Applied Materials 0041-26723 Bonded Assembly, EV Group 540, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
540EV Group
OEMApplied MaterialsEV Group
CategoryPackaging & BondingPackaging & Bonding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0041-26723 Bonded AssemblyEV Group 540
Specifications
Configuration—Anodic bond, fusion bond, adhesive bond[1]
Wafer sizes—6, 8 inch[1]
Maximum substrate size—300 mm[2]
Bond force—up to 350 kN[2]
Bonding types—Anodic bond, fusion bond, adhesive bond[1]
Automation—Semi automatic (4 stations) / Fully automated single-chamber[3]
Bond tools included—(4x) 8" tools, (4x) 6" tools, (1x) 4" tool[1]
Maximum bond chambers—1[2]
Compatible alignment systems—SmartView and MBA300[2]
Maximum heater size—300 mm[2]
Loading chamber—2-axis robot[2]
Max. bond chambers—1[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]evgroup.comevgroup.com
  3. [3]waferpedia.comwaferpedia.com