Waferpedia

Comparison ledger

0020 34833 PartversusV 70

Applied Materials 0020 34833 Part, Varian V 70, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 34833 PartApplied Materials
V 70Varian
OEMApplied MaterialsVarian
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 34833 PartVarian V 70
Cited variants—
Specifications
ConfigurationBlock Cont Mount H / V Interlock[2]With controller, no front panel display[3]
Voltage—120V, 50/60Hz[3]
Type—Turbomolecular vacuum pump[1]
Applications—High and ultra-high vacuum applications[1]
Turbine stages—11 bladed stages[1]
Motor input—54 Vac three-phase at 1250 Hz[1]
Input power—54 VAC, three phase, 1,250 Hz[4]
High-vacuum flange versions—ISO 63, ConFlat 4.5-inch OD, KF 40 NW, ConFlat 2.75-inch OD[1]
Pumping speed with 4.5-inch CF or ISO 63—N2: 68 l/s; He: 60 l/s; H2: 45 l/s[1]
Pumping speed with 2.75-inch CF or KF 40 NW—N2: 45 l/s; He: 50 l/s; H2: 41 l/s[1]
Compression ratio—N2: 5 x 10^7; He: 4 x 10^3; H2: 4 x 10^2[1]
Base pressure—1 x 10^-9 mbar (8 x 10^-10 Torr)[1]
Fore-vacuum connection—KF 16 NW flange[1]
Cooling—Natural convection air cooling; optional water cooling or forced air cooling[1]
Vibration amplitude—< 0.01 μm[1]
Operating position—Any position[1]
Input—54 VAC, three phase, 1,250 Hz[4]
Start-up time—< 60 seconds[4]
Rotational speed—75,000 rpm[4]
Noise level—45 dB(A) at 1 meter[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]pages.uoregon.edupages.uoregon.edu
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]ptbsales.comptbsales.com