Comparison ledger
Applied Materials 0010 47763, Lam Research 9600, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010 47763Applied Materials | 9600Lam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010 47763 | Lam Research TCP 9600 |
| Specifications | ||
| Configuration | 2nd Source New[1] | Envision Software[4] |
| Type | Monopolar Dual Heated[2] | — |
| Description | ASSY, ESC, BONDED, MONOPOLAR DUAL HEATED[3] | — |
| Possible Materials | Al2O3 (aluminum oxide) or AlN (aluminum nitride)[2] | — |
| Model | 0010-47763[1] | — |
| OEM | Applied Materials[1] | — |
| Material (possible) | Al2O3 (aluminum oxide) or AlN (aluminum nitride)[2] | — |
| Application | Fixing wafers in etching process (PVD, CVD, ETCH)[2] | — |
| Quantity available (source) | 1[2] | — |
| Voltage | — | 208 V[4] |
| DSQ / Exit Load Lock | — | Heated paddle[5] |
| Wafer Size | — | 8 inch[4] |
| Software | — | Envision Software[4] |
| Load/Unload | — | Hine Cassette Indexer[4] |
| Entrance Load-lock | — | Present[4] |
| Remote AC Panel | — | Present[4] |
| Main Chamber Clamping | — | Bottom Actuated Clamping System[4] |
| Main Chamber Turbo Pump | — | Adixen Alcatel ATH 1300[4] |
| Main Chamber Valve | — | VAT 65[4] |
| Main Chamber Gas Configuration | — | 6 Gasses[4] |
| Main Chamber RF Generators | — | RPG 1250[4] |
| DSQ/Exit Load Lock Gas Configuration | — | 3 Gases[4] |
| DSQ/Exit Load Lock | — | WVDS, Heated Paddle, APM (Atmospheric Passivation Module)[4] |
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