Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, MKS CH24P1, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | CH24P1MKS |
|---|---|---|
| OEM | Applied Materials | MKS |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | MKS CH24P1 |
| Cited variants | — |
|
| Specifications | ||
| Make | Applied Materials[2] | — |
| Model | 0010-22161[2] | — |
| Description | HTESC PH 1 REV A[3] | — |
| Condition | Used[3] | — |
| Stock Number | BM6628[3] | — |
| Output Power | — | 24 kW[4] |
| Power Set Point Accuracy | — | ±1%[4] |
| Communication Interface | — | EtherCAT or Analog DB25[4] |
| Design | — | Compact split applicator power design[4] |
| Application | — | High flow applications[4] |
| Type | — | Remote Plasma Source for High Flow Applications[1] |
| Power Output | — | 24 kW[1] |
| RF Frequency | — | 400 kHz[1] |
| Accuracy | — | ±1% to power set point[1] |
| Gas Supply During Ignition | — | Ar NF3[1] |
| Operating Window | — | 1-25 slm 20T[5] |
| Mixed Species Space | — | 30-90 slm[5] |
| Compatible Species | — | NF3, O2, N2, Ar[1] |
| THD | — | <15%[1] |
| Inlet Gas Connection | — | KF40[1] |
| Outlet Gas Connection | — | KF50[1] |
| Control Interface | — | Analog: DB25; Digital: EtherCAT[1] |
| Power Requirements | — | 208 V, 3 phase 50/60 Hz, 75 Amps RMS max phase[1] |
| Dimensions | — | Remote Head: 22.02 x 10.76 x 11.1 in. (55.93 x 27.33 x 28.19 cm); Power Supply: 21.24 x 19.00 x 7.0 in. (53.95 x 48.26 x 17.78 cm)[1] |
| Weight | — | Remote Head: 100 lbs. (45.36 kg); Power Supply: 62 lbs. (28.12 kg)[1] |
| Compliance | — | SEMI F47[1] |