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0010-22161 High EFF RF MatchversusTCC-151W

Applied Materials 0010-22161 High EFF RF Match, Espec TCC-151W, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsEspec
Category——
Wafer size——
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FamilyApplied Materials 0010-22161 High EFF RF MatchEspec TCC-151W
Cited variants—
Specifications
MakeApplied Materials[2]—
Model0010-22161[2]—
DescriptionHTESC PH 1 REV A[3]—
ConditionUsed[3]—
Stock NumberBM6628[3]—
type—rapid-rate thermal cycle chamber[1]
model—TCC-151W[1]
temperature range—−70℃ to +180℃[1]
temperature rate of change—15K/min[1]
interior dimensions—800×500×400 mm[1]
Sources (3)Every fact above is drawn from these public sources
  1. [1]espec.co.jpespec.co.jp
  2. [2]Equipment inventory listing
  3. [3]tarasemi.comtarasemi.com