Waferpedia

Comparison ledger

0010-21246 Partversus415 RFG

Applied Materials 0010-21246 Part, Tegal 415 RFG, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-21246 PartApplied Materials
415 RFGTegal
OEMApplied MaterialsTegal
Category——
Wafer size——
Process node——
Introduced——
Production run—1981–
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Tegal 415 RFG
Specifications
Model—415 RFG[1]
Type—Plasma Asher[1]
Vintage—1981[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing