Comparison ledger
Applied Materials 0010-18024 Pyrometer Assembly, Bruker D 8 Fabline, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-18024 Pyrometer AssemblyApplied Materials | D 8 FablineBruker |
|---|---|---|
| OEM | Applied Materials | Bruker |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | Wafer chuck and standard sample holder |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-18024 Pyrometer Assembly | Bruker D 8 Fabline |
| Specifications | ||
| Configuration | Capable of working on Applied Materials Radiance[1] | Pattern recognition software[2] |
| Handler System | — | Automation software PTO from Peer Group[2] |
| Software Version | — | 77-2.3A-6A-5A-5A-R6A[2] |
| Scanning range of two theta | — | min. 28° – max. 99°, Omega is limited to min. 30° max. 80° to avoid collision with 300mm wafer chuck[2] |
| Wafer size | — | Wafer chuck and standard sample holder[2] |
| X-ray source | — | TXS point focus (50kV 50mA) generator installed in the electronic cabinet behind the tool[2] |
| Two theta scanning range | — | 28° – 99°[2] |
| Omega range | — | 30° – 80°[2] |
| Detector | — | LynxEye XE[2] |
| Stage | — | Multi-sample holder with wafer chuck for 300mm wafers and standard Bruker sample holder[2] |
| Slits | — | Motorized slits and fixed slit 2mm primary side[2] |
| Automation | — | Fully automated with automation software PTO from Peer Group[2] |
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