Waferpedia

Comparison ledger

0010-16392 ESC AssemblyversusCentura II

Applied Materials 0010-16392 ESC Assembly, Applied Materials Centura II, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-16392 ESC AssemblyApplied Materials
Centura IIApplied Materials
OEMApplied MaterialsApplied Materials
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-16392 ESC AssemblyApplied Materials Centura
Cited variants—
Specifications
OEMApplied Materials[2]Applied Materials[1]
Model0010-16392[2]Centura II[1]
TypeESC Assembly[2]—
Wafer Size300 mm[3]—
Electrode ConfigurationDual[3]—
Configuration—DPS + Metal[4]
Category—Etch[1]
Wafer sizes—6 inch[4]
Configuration / options—DPS + Metal[1]
Chamber—DPS II / DPS / Super E / eMxP+ / MxP+ / MxP / eMAX[5]
Application—Poly / Metal / Oxide etch[5]
Wafer size—6 inch[4]
Chamber options—DPS II, DPS, Super E, eMxP+, MxP+, MxP, eMAX[1]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]spwindustrial.comspwindustrial.com
  4. [4]inventory listing
  5. [5]semistarcorp.comsemistarcorp.com