Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Applied Materials Centura I DPS Poly, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | Centura I DPS PolyApplied Materials |
|---|---|---|
| OEM | Applied Materials | Applied Materials |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Applied Materials Centura |
| Specifications | ||
| OEM | Applied Materials[1] | — |
| Model | 0010-16392[1] | — |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | 8 inch[3] |
| Electrode Configuration | Dual[2] | — |
| Configuration | — | 2x DPS Poly Chambers[3] |
| Phase | — | 3 Phase[3] |
| Voltage | — | 208 Vac[3] |
| Chambers | — | 2x DPS Poly Chambers[3] |
| RF Generators | — | Advanced Energy RF 5S and RF 20 RWC 2000[3] |
| Power | — | 3 Phase, 4 Wire, 208 Vac, 50/60 Hz[3] |
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