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Comparison ledger

0010-13622 RF Match forversusInfinity 18

Applied Materials 0010-13622 RF Match for, Denton Vacuum Infinity 18, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-13622 RF Match forApplied Materials
Infinity 18Denton Vacuum
OEMApplied MaterialsDenton Vacuum
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13622 RF Match forDenton Vacuum Infinity 18
Specifications
ConfigurationHigh Efficiency HE RF Match-Bias[1]Telemark 860 deposition controller panel[2]
Model0010-13622[1]—
Product TypeRF Match for PVD (Physical Vapor Deposition)[1]—
FeatureHigh Efficiency HE RF Match-Bias[1]—
Chamber size—18" x 23" x 36"[3]
Voltage—208V, 3Ph, 50/60Hz, 70A[3]
Deposition controller—Telemark 860[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com