Waferpedia

Comparison ledger

0010-13622 RF Match forversusE 2000 EPI Reactor

Applied Materials 0010-13622 RF Match for, ASM E 2000 EPI Reactor, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-13622 RF Match forApplied Materials
OEMApplied MaterialsASM
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2008 Refurbished
Control system——
Generation——
FamilyApplied Materials 0010-13622 RF Match forASM E 2000 EPI Reactor
Specifications
ConfigurationHigh Efficiency HE RF Match-Bias[1]E 2 Upgraded to E 2000[2]
Model0010-13622[1]—
Product TypeRF Match for PVD (Physical Vapor Deposition)[1]—
FeatureHigh Efficiency HE RF Match-Bias[1]—

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing