Waferpedia

Comparison ledger

0010-03485 Magnet AssyversusSEZ RST 201

Applied Materials 0010-03485 Magnet Assy, Lam Research SEZ RST 201, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03485 Magnet AssyApplied Materials
SEZ RST 201Lam Research
OEMApplied MaterialsLam Research
Category——
Wafer size——
Process node——
Introduced——
Production run—1997–
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-03485 Magnet AssyLam Research SEZ
Specifications
ConfigurationWP AL 300mm PVD[1]Single Cleaning[5]
OEMApplied Materials[1]—
Model0010-03485[1]RST 201[5]
DescriptionMAGNET ASSY, WP AL 300MM PVD[2]—
ProcessPVD[3]—
Wafer size300mm[4]—
VersionSpares[4]—
Part Number0010-03485[1]—
ManufacturerApplied Materials[1]Lam / SEZ[5]
Process TypePVD (Physical Vapor Deposition)[1]—
Application (Material)Aluminum (AL)[1]—
Wafer Diameter (associated)300 mm[1]—
Wafer Sizes—8 inch[5]
Tool type—single cleaning tool[5]
Process type—single-wafer wet chemical processor[6]
Process chamber count—single process chamber[6]
Load ports—two open-cassette load ports[6]
Sources (6)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]layla-ec.comlayla-ec.com
  4. [4]fabsurplus.comfabsurplus.com
  5. [5]inventory listing
  6. [6]waferpedia.comwaferpedia.com