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Comparison ledger

0010-03485 Magnet Assyversus9220

Applied Materials 0010-03485 Magnet Assy, Hitachi 9220, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03485 Magnet AssyApplied Materials
9220Hitachi
OEMApplied MaterialsHitachi
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-03485 Magnet AssyHitachi 9220
Specifications
ConfigurationWP AL 300mm PVD[1]—
OEMApplied Materials[1]—
Model0010-03485[1]—
DescriptionMAGNET ASSY, WP AL 300MM PVD[2]—
ProcessPVD[3]—
Wafer size300mm[4]—
VersionSpares[4]—
Part Number0010-03485[1]—
ManufacturerApplied Materials[1]—
Process TypePVD (Physical Vapor Deposition)[1]—
Application (Material)Aluminum (AL)[1]—
Wafer Diameter (associated)300 mm[1]—
Length Measurement Reproducibility—± 1% or 3 nm (3σ) larger value[5]
Secondary Electron Image Resolution—3 nm at acceleration voltage 0.8 kV[5]
Acceleration Voltage—500 to 1600 V (variable in 10 V steps)[5]
Throughput (continuous measurement mode)—56 wafers / hr[5]
Measuring Range—0.1 μm to 2.0 μm[5]
Image Magnification (SEM)—1k to 300k times[5]
Stage Movement Range (X-axis)—0-200 mm[5]
Stage Movement Range (Y-axis)—0-200 mm[5]
Stage Drive Speed—Max. 100 mm / sec (each X-axis & Y-axis)[5]
Lens System—Electromagnetic Lens System, Booster Stock Lens[5]
Detection System—Scintillator / photomultiplier detector using EXB filter; 2 stage detection method for SE and BSE images[5]
Power Supply (208V variant)—208 V, 60 Hz, Single Phase[5]
Power Supply (100V variant)—100V, 60 Hz, Single Phase, 6kVA[5]
Power Supply (200V variant)—200V, 60 Hz, Single Phase[5]
Wafer Sizes Supported—2-inch, 8-inch, 12-inch[5]
Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]layla-ec.comlayla-ec.com
  4. [4]fabsurplus.comfabsurplus.com
  5. [5]waferpedia.comwaferpedia.com